Abstract

ALCALA OCHOA, N; MENDIOLA, G  and  LANDGRAVE, J.E.A.. Flatness measurement using a grazing incidence interferometer. Rev. mex. fis. [online]. 2007, vol.53, n.1, pp.66-71. ISSN 0035-001X.

The purpose of this work is to report results of flatness measurements using a grazing incidence interferometer. We show that this interferometer provides enough accuracy to measure nominally flat polishing tools and rough surfaces. In order to calculate the deformation of the surface under test, an interferogram is analyzed with digital imaging techniques based on Fourier methods. We found experimentally that the entire surface topography can be recovered with errors lower than ~ 0.6 μm, or ~ λ_eqv/6, where λ_eqv = 3.6441 μm is the equivalent wavelength of the interferometer.

Keywords : Optical testing; interferometry; fringe analysis; laser applications.

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