Capacitive MEMS accelerometer wide range modeling using artificial neural network

 

A. Baharodimehr¹, A. Abolfazl Suratgar*², H. Sadeghi³

 

¹ Department of Electrical Engineering, Arak University, Arak, Iran.

² Department of Electrical Engineering, Tehran Polytechnic University, Tehran, Iran. *a–suratgar@araku.ac.ir, TEL: +98–861–223–2813, FAX:+98–861–222–5946.

³ Department of Physics, Arak University, Arak, Iran.

 

ABSTRACT

This paper presents a nonlinear model for a capacitive microelectromechanical accelerometer (MEMA). System parameters of the accelerometer are developed using the effect of cubic term of the folded–flexure spring. To solve this equation, we use the FEA method. The neural network (NN) uses the Levenberg–Marquardt (LM) method for training the system to have a more accurate response. The designed NN can identify and predict the displacement of the movable mass of accelerometer. The simulation results are very promising.

Keywords: Accelerometer, MEMS, cubic stiffness, neural network.

 

RESUMEN

Este trabajo presenta un modelo no lineal para un acelerómetro microelectromecánico de tipo capacitivo (MEMA). Asimismo, en él se desarrollan parámetros de sistema de el acelerómetro utilizando el efecto del término cúbico del resorte de flexion plegado. Para resolver esta ecuación, usamos el método FEA. La red neuronal (RN) usa el método Levenberg–Marquardt (LM) para entrenar al sistema a fin de que tenga una respuesta más exacta. La RN diseñada puede identificar y predecir el desplazamiento de la masa móvil del acelerómetro. Los resultados de la simulación son muy prometedores.

Palabras clave: Acelerómetro, MEMS, rigidez cúbica, red neuronal.

 

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References

[1] W. L. Davis, "Mechanical Analysis and Design of Vibratory Micromachined", Ph.D. thesis, University of California, Brekeley, 2001.         [ Links ]

[2] P. Malatkar, "Nonlinear Vibrations of Cantilever Beams and Plates", Ph.D thesis, Faculty of the Virginia Polytechnic Institue and State University,2003.         [ Links ]

[3] Q. Jing, "Modeling and Simulation for Design of Suspended MEMS", Ph.D. thesis, Carnegie Mellon University, 2003.         [ Links ]

[4] S.V. Iyer, "Modeling and Simulation of Non–idealities in a Z–axis CMOS–MEMS Gyroscope", Ph.D. thesis, Carnegie Mellon University, 2003.         [ Links ]

[5] J. Bienstman, R. Puers, and J. Vandewalle, "Periodic and chaotic behavior of the autonomous impact resonator", IEEE Proc. MEMS'98, pp.562–567,1998.         [ Links ]

[6] A.F. El–Bassiouny and M. Eissa, "Dynamics of a single–degree–of–freedom structure with quadratic, cubic and quartic nonlinearities to a harmonic resonance", APPL. Math. Comput.,vol. 139,pp.1–21, 2003.         [ Links ]

[7] S.K. De and N.R. Aluru,"Complex Nonlinear Oscillation in Electrostatically Actuated Microstructures",Journal of Microelectromechanical Systems,Vol. 15, NO. 2, 2006.         [ Links ]

[8] S. Rekuc, "Optimization for a Robust MEMS Accelerometer Spring", Final project, Georgia institute of technology, The G. W. Woodroof School of Mechanical Engineering, 2003.         [ Links ]

[9] D. P. Beach, "Design of an Open Loop Capacitive Accelerometer", Mini–thesis, Indiana State University, The College of Technology,2004.         [ Links ]

[10] T. Veijola, H. Kuisma and J. Lahdenpera, "Compact Large–Displacement Model for a Capacitive Accelerometer", MSM'99, pp. 218–221, 1999.         [ Links ]

[11] V. Gupta, "Approaches to Synthesis of a CMOS Accelerometer", M.Sc. Thesis, Carnegie Mellon University, 2000.         [ Links ]

[12] G. K. Fedder, "Simulation of Micro–electromechanical Systems", Ph.D thesis, University of California, Berkeley, 1994.1.         [ Links ]

[13] G. Zhang, "Design and Simulation of a CMOS–MEMS Accelerometer", M.Sc. thesis, Carnegie Mellon University,1998.         [ Links ]

[14] A. K. Sharma and A. Teverovksy, "Evaluation of Thermo–Mechanical Stability of COTS Dual–Axis MEMS Accelerometers for Space Applications", Component Technology and Radiation Effects (Code 562), 2000.         [ Links ]

[15] H. Luo, "Integrated Multiple Device CMOS–MEMS IMU Systems and RF MEMS Applications", Ph.D thesis, Carnegie Mellon University,2002        [ Links ]

[16] A. A. Suratgar and M. B. Tavakoli and A. Hossenabadi, "Modified Levenberg–Marquardt neural network training ", Enformatika , 2005.         [ Links ]

[17] A. A. Suratgar and A. R. Bahadorimehr and H. Sadeghi and M. Dousti, "Nonlinear Modeling of a Capacitive MEMS Accelerometer Using Neural Network", in proceedings of EMERGING MECHANICAL TECHNOLOGY Macro to Nano conference , Delhi, India, 2007.         [ Links ]