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Revista mexicana de física
Print version ISSN 0035-001X
Rev. mex. fis. vol.51 n.4 México Aug. 2005
Investigación
Confocal profiling of grooves and ridges with circular section using the divided aperture technique
J.F. Aguilar
Instituto Nacional de Astrofísica Óptica y Electrónica, Luis Enrique Erro No. 1, Sta. Ma. Tonantzintla, Puebla 72840, Pue., México.
Recibido el 1 de marzo de 2005.
Aceptado el 25 de mayo de 2005.
Abstract
The divided-pupil technique for the simulation of confocal imaging is applied to remove those artifacts appearing due to the symmetry of the object. A rigorous treatment is used to model the imaging system which is a two-dimensional confocal microscope, working in reflection mode. Since the geometry of the associated electromagnetic problem is 2-D, the objects analyzed are highly symmetric and cylindrical. The advantages and limitations of this technique are discussed and shown by means of examples.
Keywords: Confocal microscopy; light scattering; optical profilometry.
Resumen
La técnica de pupila dividida se aplica en la simulación de un sistema confocal formador de imágenes para eliminar elementos espurios debidos a la simetría del objeto. Un tratamiento riguroso es usado para modelar la formación de imágenes en el sistema el cual es un microscopio confocal en dos dimensiones; los objetos analizados son altamente simétricos y cilíndricos. Las ventajas y limitaciones de esta técnica son discutidas y demostradas por medio de ejemplos.
Descriptores: Microscopía confocal; esparcimiento de luz; perfilometría óptica.
PACS: 42.25.Fx; 42.30.Va
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Acknowledgment
This work has been supported by CONACyT through the project 37654-E.
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