Abstract

ELVIRA-HERNANDEZ, E. A. et al. Design of a MEMS-Based Piezoelectric Vibration Energy Harvesting Device for Automotive Applications. Comp. y Sist. [online]. 2019, vol.23, n.1, pp.71-79.  Epub Feb 26, 2021. ISSN 2007-9737.  https://doi.org/10.13053/cys-23-1-3143.

The automotive industry requires new sensors to improve automotive performance, comfort and safety. These sensors will need the electrical power for their operation, which could be supplied by future MEMS energy harvesting devices. We present the design of a MEMS-based piezoelectric vibration energy harvesting (PVEH) device. The design is formed of two cantilevers of trapezoidal shape (2500 x 1064 x 9 μm) that have two proof masses in their ends. The cantilevers and proof masses are designed of silicon with a PZT-5H film, considering the PiezoMUMPs fabrication process of MEMSCAP. This PVEH device can generate voltage when its structure is deformed at resonance under a vibration acceleration. Finite element method (FEM) models of the PVEH device are developed to predict its electrical and structural behavior at resonance under a vibration acceleration of 12 m/s2. The proposed device has a resonant frequency of 207.8 Hz, a maximum deflection of 201 μm and a generated voltage of 61.5 mV with an electrical resistive load of 10 kΩ. A PVEH devices array could be used to supply electrical power to sensors of modern and future automobiles.

Keywords : Finite element method; energy harvesting; MEMS; piezoelectric; PiezoMUMPs; vibration.

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