Abstract

RAMIREZ-FERNANDEZ, F.J.; SALCEDO, W.J.  and  PEIXOTO, N.. Integrated sensors and microsystems. Rev. mex. fis. [online]. 2006, vol.52, suppl.2, pp.104-107. ISSN 0035-001X.

This work presents a brief review and some significant results about integrated sensors and microsystems such as microelectrode array (MEA) for biological cell culture studies and gas sensors based on nanostructured materials such as porous silicon (PS). Developed MEA provides electrical access to biological neuron culture for signal recording and stimulation showing that the charge injection limit can be lowered to less than 100 nC/cm². The gas sensors based on PS material are investigated using the changes in optical material properties as a function of gas species and concentrations.

Keywords : Integrated sensors; microsystems; porous silicon.

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