Abstract

FERRO, R et al. Response enhancement of sprayed ZnO thin film-based NO₂ sensor by indium-doping. Rev. mex. fis. [online]. 2006, vol.52, suppl.2, pp.23-25. ISSN 0035-001X.

The development of a sprayed ZnO thin film-based NO₂ sensor is reported. The effect of In-doping on the sensor performance is studied. With the addition of 3 wt % of indium nitrate to the spraying solution, a good sensor response to 5 ppm of NO₂ at 275°C and an important decrease in the device electrical resistance is obtained. The dependence of the electrical resistance on temperature in several gas atmospheres is also considered. A possible sensitization mechanism is discussed.

Keywords : Gas sensor; spray pyrolysis; ZnO.

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