Abstract

GUARNEROS GARCIA, Orlando et al. Uso del microscopio confocal para la caracterización dimensional en micromecanizados (step height). Ingenier. mecáni. tecnolog. desarroll [online]. 2012, vol.4, n.2, pp.73-80. ISSN 1665-7381.

The development of devices whose dimensions are of the order of magnitude of micrometers requires measurement systems to verify not only their quantitative but also qualitative characteristics. Even though there is a wide range of equipments that can be used towards this end, confocal microscopy reveals itself as a feasible technique in the engineering field, even some manufacturers are specializing their equipment in the areas of materials science and metrology. However, it is necessary to estimate their uncertainty and determine its degree of dispersion. In the present work it shown how to obtain the height differences from 3D generated topographical surfaces, to do it a height standard is used and a series of tests is performed that consider, among other things, the lens used and different magnifications, the field of measurement and the position of the object to be measured. Finally the information is analyzed by using graphs showing the estimated uncertainties throughout the entire process.

Keywords : Metrology; calibration; confocal microscope; uncertainties and step height.

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