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Superf. vacío vol.31 no.3 Ciudad de México jul./sep. 2018
 Artículos de investigación | | | | | | · Amorphous Zr(OH)4 to t-ZrO2 transformed isothermally
Meza-Galvez, J.; Olea-Mejía, O.; Hernández-López, S.; Vigueras-Santiago, E.; Camacho-López, M.
| | | | | | · Surface micromachining of a micro electromechanical inertial transducer based on commercially available Floating Gate Transistor technology
Abarca-Jiménez, G.S.; Romero-Paredes Rubio, G.; Reyes-Barranca, M. A.; Alemán-Arce, M.A.; Munguía-Cervantes, J.E.; Mendoza-Acevedo, S.
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