E. Kussul1, L. Ruiz-Huerta1, A. Caballero-Ruiz1, A. Kasatkin2, L. Kasatkina2, T. Baidyk1 & G. Velasco1
1 Center of Applied Science and Technological Development, National Autonomous University of Mexico.
2 International Research and Training Center of Information Technologies and Systems, National Academy of Sciences of Ukraine.
Received: January 29th, 2002.
Accepted: January 13th, 2004.
Abstract
A new technology for production of low-cost micromechanical devices is proposed. This technology is based on concepts already known in conventional mechanics, used to produce a number of equipment of smaller sizes generation after generation. It is necessary to adapt each generation of equipment to the changes in physical behavior due to the decreasing scale. This technology is developed in the context of the microfactory creation. The main requirements for microequipment development are discussed. Also, the micromachine tool prototypes belonging to the first generation are developed and tested in the Laboratory of Micromechanics and Mechatronics of the Center of Applied Research and Technological Development, UNAM. The equipment characterization is done. The microfilter design and fabrication is described as an example of the practical application.
Keywords: Micromachine tool, Microfilters, Accuracy.
Resumen
En este trabajo se presenta una nueva tecnología para la producción de dispositivos micromecánicos de bajo costo, dentro del contexto de desarrollo de microfábricas. Ésta tecnología propone producir una serie de generaciones de equipo cada vez de menor tamaño, basándose en los conceptos ya conocidos de la mecánica convencional. Se describe también la necesidad de adaptar cada generación de equipo a los cambios de comportamiento físico originados por el decremento de escala. Los principales requerimientos para el desarrollo de microequipo son discutidos y unas micromáquinas herramientas pertenecientes a la primera generación de microequipo, desarrolladas en el Laboratorio de Micromecánica y Mecatrónica del Centro de Ciencias Aplicadas y Desarrollo Tecnológico, UNAM, son descritas y probadas. El diseño y fabricación de un microfiltro es utilizado como un ejemplo de la aplicación práctica.
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]]> Acknowledgements
Acknowledgements to Laboratory of Metrology and Laboratory of Materials and Sensors (CCADET UNAM), in particular to José M. Saniger Bleza, José G. Bañuelos Muñetón, Rigoberto Nava Sandoval, Gerardo Ruiz Botello and José Sánchez Viscaíno, and for help in the manufacturing to Mr. Mario Rodríguez Segundo.
This work was supported by projects IN-118799, CONACYT 33944-U, NSF-CONACYT 39395A, PAPIIT IN-112102.
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