<?xml version="1.0" encoding="ISO-8859-1"?><article xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance">
<front>
<journal-meta>
<journal-id>1665-3521</journal-id>
<journal-title><![CDATA[Superficies y vacío]]></journal-title>
<abbrev-journal-title><![CDATA[Superf. vacío]]></abbrev-journal-title>
<issn>1665-3521</issn>
<publisher>
<publisher-name><![CDATA[Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C.]]></publisher-name>
</publisher>
</journal-meta>
<article-meta>
<article-id>S1665-35212005000400021</article-id>
<title-group>
<article-title xml:lang="es"><![CDATA[Fabricación de guías de onda ópticas en silicio utilizando óxido de silicio y nitruro de silicio]]></article-title>
</title-group>
<contrib-group>
<contrib contrib-type="author">
<name>
<surname><![CDATA[Chávez Velázquez]]></surname>
<given-names><![CDATA[Rosa]]></given-names>
</name>
<xref ref-type="aff" rid="Aff"/>
</contrib>
<contrib contrib-type="author">
<name>
<surname><![CDATA[Zaldívar Huerta]]></surname>
<given-names><![CDATA[Ignacio]]></given-names>
</name>
<xref ref-type="aff" rid="Aff"/>
</contrib>
<contrib contrib-type="author">
<name>
<surname><![CDATA[Reyes Betanzo]]></surname>
<given-names><![CDATA[Claudia]]></given-names>
</name>
<xref ref-type="aff" rid="Aff"/>
</contrib>
<contrib contrib-type="author">
<name>
<surname><![CDATA[Díaz Sánchez]]></surname>
<given-names><![CDATA[Alejandro]]></given-names>
</name>
<xref ref-type="aff" rid="Aff"/>
</contrib>
</contrib-group>
<aff id="Af1">
<institution><![CDATA[,Instituto Nacional de Astrofísica, Óptica y Electrónica Depto. de Electrónica ]]></institution>
<addr-line><![CDATA[Puebla ]]></addr-line>
<country>México</country>
</aff>
<pub-date pub-type="pub">
<day>00</day>
<month>00</month>
<year>2005</year>
</pub-date>
<pub-date pub-type="epub">
<day>00</day>
<month>00</month>
<year>2005</year>
</pub-date>
<volume>18</volume>
<numero>4</numero>
<fpage>21</fpage>
<lpage>23</lpage>
<copyright-statement/>
<copyright-year/>
<self-uri xlink:href="http://www.scielo.org.mx/scielo.php?script=sci_arttext&amp;pid=S1665-35212005000400021&amp;lng=en&amp;nrm=iso"></self-uri><self-uri xlink:href="http://www.scielo.org.mx/scielo.php?script=sci_abstract&amp;pid=S1665-35212005000400021&amp;lng=en&amp;nrm=iso"></self-uri><self-uri xlink:href="http://www.scielo.org.mx/scielo.php?script=sci_pdf&amp;pid=S1665-35212005000400021&amp;lng=en&amp;nrm=iso"></self-uri><abstract abstract-type="short" xml:lang="es"><p><![CDATA[Resumen Se diseñaron y fabricaron guías de onda ópticas planares de índice abrupto utilizando películas de óxido de silicio (SiO2) y nitruro de silicio (Si3N4) obtenidas por técnica PECVD. Debido a las características ópticas, mecánicas y eléctricas, se eligió el silicio como material de sustrato. Pruebas de transmitancia de luz a una longitud de onda de 650 nm fueron realizadas con éxito. La fabricación de guías ópticas es completamente compatible con el proceso CMOS, por lo que se abre la posibilidad de realizar la integración de componentes ópticos y electrónicos en un mismo substrato de silicio.]]></p></abstract>
<abstract abstract-type="short" xml:lang="en"><p><![CDATA[Abstract Planar optical waveguides of abrupt index refraction, using oxide silicon (SiO2) and silicon nitride (Si3N4) films obtained by means of PECVD technique were designed and realized. Optical, mechanicals and electrics characteristics were considered to selected silicon as substrate material. Testing of transmittance for a wavelength of 650 nm was successfully realized. The proposed optical waveguides are fully compatible with the CMOS fabrication process of the INAOE&#8217;s laboratory. Obtained results allows the integration of optical and electronics devices in a shared silicon substrate.]]></p></abstract>
<kwd-group>
<kwd lng="es"><![CDATA[Óptica integrada]]></kwd>
<kwd lng="es"><![CDATA[Guías ópticas integradas]]></kwd>
<kwd lng="es"><![CDATA[PECVD]]></kwd>
<kwd lng="es"><![CDATA[Comunicaciones ópticas]]></kwd>
<kwd lng="en"><![CDATA[Integrated optics]]></kwd>
<kwd lng="en"><![CDATA[Integrated optical waveguides]]></kwd>
<kwd lng="en"><![CDATA[PECVD]]></kwd>
<kwd lng="en"><![CDATA[Optical communications]]></kwd>
</kwd-group>
</article-meta>
</front><back>
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</article>
