<?xml version="1.0" encoding="ISO-8859-1"?><article xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance">
<front>
<journal-meta>
<journal-id>0035-001X</journal-id>
<journal-title><![CDATA[Revista mexicana de física]]></journal-title>
<abbrev-journal-title><![CDATA[Rev. mex. fis.]]></abbrev-journal-title>
<issn>0035-001X</issn>
<publisher>
<publisher-name><![CDATA[Sociedad Mexicana de Física]]></publisher-name>
</publisher>
</journal-meta>
<article-meta>
<article-id>S0035-001X2019000200133</article-id>
<article-id pub-id-type="doi">10.31349/revmexfis.65.133</article-id>
<title-group>
<article-title xml:lang="en"><![CDATA[Physical properties of reactive RF sputtered a-IZON thin films]]></article-title>
</title-group>
<contrib-group>
<contrib contrib-type="author">
<name>
<surname><![CDATA[Ortega]]></surname>
<given-names><![CDATA[J.J.]]></given-names>
</name>
<xref ref-type="aff" rid="Aff"/>
</contrib>
<contrib contrib-type="author">
<name>
<surname><![CDATA[Escobedo-Galván]]></surname>
<given-names><![CDATA[C.R.]]></given-names>
</name>
<xref ref-type="aff" rid="Aff"/>
</contrib>
<contrib contrib-type="author">
<name>
<surname><![CDATA[Avelar-Muñoz]]></surname>
<given-names><![CDATA[F.]]></given-names>
</name>
<xref ref-type="aff" rid="Aff"/>
</contrib>
<contrib contrib-type="author">
<name>
<surname><![CDATA[Ortiz-Hernández]]></surname>
<given-names><![CDATA[A. A.]]></given-names>
</name>
<xref ref-type="aff" rid="Aff"/>
</contrib>
<contrib contrib-type="author">
<name>
<surname><![CDATA[Tototzintle-Huitle]]></surname>
<given-names><![CDATA[H.]]></given-names>
</name>
<xref ref-type="aff" rid="Aff"/>
</contrib>
<contrib contrib-type="author">
<name>
<surname><![CDATA[Falcony]]></surname>
<given-names><![CDATA[C.]]></given-names>
</name>
<xref ref-type="aff" rid="Aff"/>
</contrib>
<contrib contrib-type="author">
<name>
<surname><![CDATA[Araiza]]></surname>
<given-names><![CDATA[J.J.]]></given-names>
</name>
<xref ref-type="aff" rid="Aff"/>
</contrib>
</contrib-group>
<aff id="Af1">
<institution><![CDATA[,Universidad Autónoma de Zacatecas Unidad Académica de Física ]]></institution>
<addr-line><![CDATA[ Zacatecas]]></addr-line>
<country>Mexico</country>
</aff>
<aff id="Af2">
<institution><![CDATA[,Instituto Politécnico Nacional Centro de Estudios Científicos y Tecnológicos 18 ]]></institution>
<addr-line><![CDATA[ Zacatecas]]></addr-line>
<country>Mexico</country>
</aff>
<aff id="Af3">
<institution><![CDATA[,Universidad Politécnica de Zacatecas Departamento de Ingeniería en Mecatrónica ]]></institution>
<addr-line><![CDATA[ Zacatecas]]></addr-line>
<country>Mexico</country>
</aff>
<aff id="Af4">
<institution><![CDATA[,Instituto Politécnico Nacional Centro de Investigación y Estudios Avanzados Departamento de Física]]></institution>
<addr-line><![CDATA[ Cd. México]]></addr-line>
<country>Mexico</country>
</aff>
<pub-date pub-type="pub">
<day>00</day>
<month>04</month>
<year>2019</year>
</pub-date>
<pub-date pub-type="epub">
<day>00</day>
<month>04</month>
<year>2019</year>
</pub-date>
<volume>65</volume>
<numero>2</numero>
<fpage>133</fpage>
<lpage>138</lpage>
<copyright-statement/>
<copyright-year/>
<self-uri xlink:href="http://www.scielo.org.mx/scielo.php?script=sci_arttext&amp;pid=S0035-001X2019000200133&amp;lng=en&amp;nrm=iso"></self-uri><self-uri xlink:href="http://www.scielo.org.mx/scielo.php?script=sci_abstract&amp;pid=S0035-001X2019000200133&amp;lng=en&amp;nrm=iso"></self-uri><self-uri xlink:href="http://www.scielo.org.mx/scielo.php?script=sci_pdf&amp;pid=S0035-001X2019000200133&amp;lng=en&amp;nrm=iso"></self-uri><abstract abstract-type="short" xml:lang="en"><p><![CDATA[Abstract The physical properties of amorphous indium zinc oxynitride (a-IZON) thin films, which were deposited at room temperature by reactive RF magnetron sputtering, were investigated. The results of the investigations indicated that the a-IZON films possessed excellent qualities: high transparency with a very low resistivity from    10  - 3  &#937; &#8901;cm to    10  - 4  &#937; &#8901;cm, while the carrier concentration showed values over    10  20 cm    &#8203;  - 3 with mobility between  10 and 21 cm    &#8203;  2 &#8901;V    &#8203;  - 1 &#8901;s   &#8203;  - 1. The incorporated nitrogen reduces the typical crystallization of IZO and favors the deposition of transparent thin films. These results show that the IZON is an ideal amorphous material for applications in transparent and flexible optoelectronic devices.]]></p></abstract>
<kwd-group>
<kwd lng="en"><![CDATA[Indium zinc oxynitride]]></kwd>
<kwd lng="en"><![CDATA[amorphous oxynitride]]></kwd>
<kwd lng="en"><![CDATA[spectral ellipsometry]]></kwd>
<kwd lng="en"><![CDATA[amorphous semiconductor]]></kwd>
<kwd lng="en"><![CDATA[IZON]]></kwd>
<kwd lng="en"><![CDATA[71.15.Mb]]></kwd>
<kwd lng="en"><![CDATA[01.30.Vv]]></kwd>
</kwd-group>
</article-meta>
</front><back>
<ref-list>
<ref id="B1">
<label>1.</label><nlm-citation citation-type="">
<person-group person-group-type="author">
<name>
<surname><![CDATA[Park]]></surname>
<given-names><![CDATA[J.]]></given-names>
</name>
<name>
<surname><![CDATA[Kang]]></surname>
<given-names><![CDATA[YC.]]></given-names>
</name>
</person-group>
<source><![CDATA[Metals and Materials International]]></source>
<year>2013</year>
<volume>19</volume>
<page-range>55-60</page-range></nlm-citation>
</ref>
<ref id="B2">
<label>2.</label><nlm-citation citation-type="">
<person-group person-group-type="author">
<name>
<surname><![CDATA[Saugar]]></surname>
<given-names><![CDATA[A. I.]]></given-names>
</name>
<name>
<surname><![CDATA[Márquez-Alvarez]]></surname>
<given-names><![CDATA[C.]]></given-names>
</name>
<name>
<surname><![CDATA[Pérez-Pariente]]></surname>
<given-names><![CDATA[J.]]></given-names>
</name>
</person-group>
<source><![CDATA[Journal of Catalysis]]></source>
<year>2017</year>
<volume>348</volume>
<page-range>177-88</page-range></nlm-citation>
</ref>
<ref id="B3">
<label>3.</label><nlm-citation citation-type="">
<person-group person-group-type="author">
<name>
<surname><![CDATA[Bottger]]></surname>
<given-names><![CDATA[P. H. M.]]></given-names>
</name>
</person-group>
<source><![CDATA[Thin Solid Films]]></source>
<year>2013</year>
<volume>549</volume>
<page-range>232-8</page-range></nlm-citation>
</ref>
<ref id="B4">
<label>4.</label><nlm-citation citation-type="">
<person-group person-group-type="author">
<name>
<surname><![CDATA[Brancho]]></surname>
<given-names><![CDATA[J. J.]]></given-names>
</name>
<name>
<surname><![CDATA[Proctor]]></surname>
<given-names><![CDATA[A. D.]]></given-names>
</name>
<name>
<surname><![CDATA[Panugantia]]></surname>
<given-names><![CDATA[S.]]></given-names>
</name>
<name>
<surname><![CDATA[Bartlett]]></surname>
<given-names><![CDATA[B. M.]]></given-names>
</name>
</person-group>
<source><![CDATA[Dalton Transactions]]></source>
<year>2017</year>
<volume>46</volume>
<page-range>12081-7</page-range></nlm-citation>
</ref>
<ref id="B5">
<label>5.</label><nlm-citation citation-type="">
<person-group person-group-type="author">
<name>
<surname><![CDATA[Zhao]]></surname>
<given-names><![CDATA[X.H.]]></given-names>
</name>
<name>
<surname><![CDATA[Li]]></surname>
<given-names><![CDATA[H.T.]]></given-names>
</name>
<name>
<surname><![CDATA[Jiang]]></surname>
<given-names><![CDATA[S.W.]]></given-names>
</name>
<name>
<surname><![CDATA[Zhang]]></surname>
<given-names><![CDATA[W.L.]]></given-names>
</name>
<name>
<surname><![CDATA[Jiang]]></surname>
<given-names><![CDATA[H.C.]]></given-names>
</name>
</person-group>
<source><![CDATA[Thin Solid Films]]></source>
<year>2017</year>
<volume>629</volume>
<page-range>1-5</page-range></nlm-citation>
</ref>
<ref id="B6">
<label>6.</label><nlm-citation citation-type="">
<person-group person-group-type="author">
<name>
<surname><![CDATA[Sparvoli]]></surname>
<given-names><![CDATA[M.]]></given-names>
</name>
<name>
<surname><![CDATA[Onmori]]></surname>
<given-names><![CDATA[R. K.]]></given-names>
</name>
<name>
<surname><![CDATA[Jorge]]></surname>
<given-names><![CDATA[F. O.]]></given-names>
</name>
<name>
<surname><![CDATA[Gazziro]]></surname>
<given-names><![CDATA[M. A.]]></given-names>
</name>
</person-group>
<source><![CDATA[IEEE Sensors Journal]]></source>
<year>2017</year>
<volume>17</volume>
<page-range>2372-6</page-range></nlm-citation>
</ref>
<ref id="B7">
<label>7.</label><nlm-citation citation-type="">
<person-group person-group-type="author">
<name>
<surname><![CDATA[Du]]></surname>
<given-names><![CDATA[X.]]></given-names>
</name>
<name>
<surname><![CDATA[Yao]]></surname>
<given-names><![CDATA[S.]]></given-names>
</name>
<name>
<surname><![CDATA[Jin]]></surname>
<given-names><![CDATA[X.]]></given-names>
</name>
<name>
<surname><![CDATA[Chen]]></surname>
<given-names><![CDATA[H.]]></given-names>
</name>
<name>
<surname><![CDATA[Li]]></surname>
<given-names><![CDATA[W.]]></given-names>
</name>
<name>
<surname><![CDATA[Liang]]></surname>
<given-names><![CDATA[B.]]></given-names>
</name>
</person-group>
<source><![CDATA[Journal of Physics D: Applied Physics]]></source>
<year>2015</year>
<volume>48</volume>
</nlm-citation>
</ref>
<ref id="B8">
<label>8.</label><nlm-citation citation-type="">
<person-group person-group-type="author">
<name>
<surname><![CDATA[Kim]]></surname>
<given-names><![CDATA[H. J.]]></given-names>
</name>
<name>
<surname><![CDATA[Hong]]></surname>
<given-names><![CDATA[S. Y.]]></given-names>
</name>
<name>
<surname><![CDATA[Kim]]></surname>
<given-names><![CDATA[D. H.]]></given-names>
</name>
<name>
<surname><![CDATA[Jeong]]></surname>
<given-names><![CDATA[H. S.]]></given-names>
</name>
<name>
<surname><![CDATA[Kwona]]></surname>
<given-names><![CDATA[H. I.]]></given-names>
</name>
</person-group>
<source><![CDATA[Journal of Vacuum Science &amp; Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena]]></source>
<year>2017</year>
<volume>35</volume>
</nlm-citation>
</ref>
<ref id="B9">
<label>9.</label><nlm-citation citation-type="">
<person-group person-group-type="author">
<name>
<surname><![CDATA[Lee]]></surname>
<given-names><![CDATA[E.]]></given-names>
</name>
</person-group>
<source><![CDATA[Scientific Reports]]></source>
<year>2016</year>
<volume>6</volume>
</nlm-citation>
</ref>
<ref id="B10">
<label>10.</label><nlm-citation citation-type="">
<person-group person-group-type="author">
<name>
<surname><![CDATA[Yamazaki]]></surname>
<given-names><![CDATA[T.]]></given-names>
</name>
</person-group>
<source><![CDATA[Applied Physics Letter]]></source>
<year>2016</year>
<volume>109</volume>
</nlm-citation>
</ref>
<ref id="B11">
<label>11.</label><nlm-citation citation-type="">
<person-group person-group-type="author">
<name>
<surname><![CDATA[Niang]]></surname>
<given-names><![CDATA[K. M.]]></given-names>
</name>
<name>
<surname><![CDATA[Bayer]]></surname>
<given-names><![CDATA[B. C.]]></given-names>
</name>
<name>
<surname><![CDATA[Meyer]]></surname>
<given-names><![CDATA[J. C.]]></given-names>
</name>
<name>
<surname><![CDATA[Flewitt]]></surname>
<given-names><![CDATA[A. J.]]></given-names>
</name>
</person-group>
<source><![CDATA[Applied Physics Letter]]></source>
<year>2017</year>
<volume>111</volume>
</nlm-citation>
</ref>
<ref id="B12">
<label>12.</label><nlm-citation citation-type="">
<person-group person-group-type="author">
<name>
<surname><![CDATA[Jang]]></surname>
<given-names><![CDATA[J. T.]]></given-names>
</name>
</person-group>
<source><![CDATA[ACS Applied Materials &amp; Interfaces]]></source>
<year>2015</year>
<volume>7</volume>
<page-range>15570-7</page-range></nlm-citation>
</ref>
<ref id="B13">
<label>13.</label><nlm-citation citation-type="">
<person-group person-group-type="author">
<name>
<surname><![CDATA[Najafi]]></surname>
<given-names><![CDATA[H.]]></given-names>
</name>
<name>
<surname><![CDATA[Karimi]]></surname>
<given-names><![CDATA[A.]]></given-names>
</name>
<name>
<surname><![CDATA[Alexander]]></surname>
<given-names><![CDATA[D.]]></given-names>
</name>
<name>
<surname><![CDATA[Dessarzin]]></surname>
<given-names><![CDATA[P.]]></given-names>
</name>
<name>
<surname><![CDATA[Morstein]]></surname>
<given-names><![CDATA[M.]]></given-names>
</name>
</person-group>
<source><![CDATA[Thin Solid Films]]></source>
<year>2013</year>
<volume>549</volume>
<page-range>224-31</page-range></nlm-citation>
</ref>
<ref id="B14">
<label>14.</label><nlm-citation citation-type="">
<person-group person-group-type="author">
<name>
<surname><![CDATA[Solano]]></surname>
<given-names><![CDATA[M. A. Carrillo]]></given-names>
</name>
</person-group>
<source><![CDATA[Ionics]]></source>
<year>2016</year>
<volume>22</volume>
<page-range>471-81</page-range></nlm-citation>
</ref>
<ref id="B15">
<label>15.</label><nlm-citation citation-type="">
<person-group person-group-type="author">
<name>
<surname><![CDATA[Ortega]]></surname>
<given-names><![CDATA[J.J.]]></given-names>
</name>
<name>
<surname><![CDATA[Aguilar-Frutis]]></surname>
<given-names><![CDATA[M.A.]]></given-names>
</name>
<name>
<surname><![CDATA[Alarcón]]></surname>
<given-names><![CDATA[G.]]></given-names>
</name>
<name>
<surname><![CDATA[Falcony]]></surname>
<given-names><![CDATA[C.]]></given-names>
</name>
<name>
<surname><![CDATA[Méndez-García]]></surname>
<given-names><![CDATA[V.H.]]></given-names>
</name>
<name>
<surname><![CDATA[Araiza]]></surname>
<given-names><![CDATA[J.J.]]></given-names>
</name>
</person-group>
<source><![CDATA[Materials Science and Engineering: B]]></source>
<year>2014</year>
<volume>187</volume>
<page-range>83-8</page-range></nlm-citation>
</ref>
<ref id="B16">
<label>16.</label><nlm-citation citation-type="">
<person-group person-group-type="author">
<name>
<surname><![CDATA[Itagaki]]></surname>
<given-names><![CDATA[N.]]></given-names>
</name>
<name>
<surname><![CDATA[Matsushima]]></surname>
<given-names><![CDATA[K.]]></given-names>
</name>
<name>
<surname><![CDATA[Yamashita]]></surname>
<given-names><![CDATA[D.]]></given-names>
</name>
<name>
<surname><![CDATA[Seo]]></surname>
<given-names><![CDATA[H.]]></given-names>
</name>
<name>
<surname><![CDATA[Koga]]></surname>
<given-names><![CDATA[K.]]></given-names>
</name>
<name>
<surname><![CDATA[Shiratani]]></surname>
<given-names><![CDATA[M.]]></given-names>
</name>
</person-group>
<source><![CDATA[Materials Research Express]]></source>
<year>2014</year>
<volume>1</volume>
</nlm-citation>
</ref>
<ref id="B17">
<label>17.</label><nlm-citation citation-type="">
<person-group person-group-type="author">
<name>
<surname><![CDATA[Nai-Qian]]></surname>
<given-names><![CDATA[W.]]></given-names>
</name>
<name>
<surname><![CDATA[Qun]]></surname>
<given-names><![CDATA[Z.]]></given-names>
</name>
<name>
<surname><![CDATA[Han-Ping]]></surname>
<given-names><![CDATA[S.]]></given-names>
</name>
</person-group>
<source><![CDATA[Journal of Inorganic Materials]]></source>
<year>2016</year>
<volume>31</volume>
<page-range>745-9</page-range></nlm-citation>
</ref>
<ref id="B18">
<label>18.</label><nlm-citation citation-type="">
<person-group person-group-type="author">
<name>
<surname><![CDATA[Ortega]]></surname>
<given-names><![CDATA[J.J.]]></given-names>
</name>
</person-group>
<source><![CDATA[Journal of Materials Science and Engineering A]]></source>
<year>2014</year>
<volume>4</volume>
<page-range>91-8</page-range></nlm-citation>
</ref>
<ref id="B19">
<label>19.</label><nlm-citation citation-type="">
<person-group person-group-type="author">
<name>
<surname><![CDATA[Ozgur]]></surname>
<given-names><![CDATA[U.]]></given-names>
</name>
<name>
<surname><![CDATA[Alivov]]></surname>
<given-names><![CDATA[Ya. I.]]></given-names>
</name>
<name>
<surname><![CDATA[Liu]]></surname>
<given-names><![CDATA[C.]]></given-names>
</name>
<name>
<surname><![CDATA[Teke]]></surname>
<given-names><![CDATA[A.]]></given-names>
</name>
<name>
<surname><![CDATA[Reshchikov]]></surname>
<given-names><![CDATA[M. A.]]></given-names>
</name>
</person-group>
<source><![CDATA[Journal of Applied Physics]]></source>
<year>2005</year>
<volume>98</volume>
</nlm-citation>
</ref>
<ref id="B20">
<label>20.</label><nlm-citation citation-type="">
<person-group person-group-type="author">
<name>
<surname><![CDATA[Kasiviswanathan]]></surname>
<given-names><![CDATA[S.]]></given-names>
</name>
<name>
<surname><![CDATA[Rangarajan]]></surname>
<given-names><![CDATA[G.]]></given-names>
</name>
</person-group>
<source><![CDATA[Journal of Applied Physics]]></source>
<year>1998</year>
<volume>75</volume>
</nlm-citation>
</ref>
<ref id="B21">
<label>21.</label><nlm-citation citation-type="">
<person-group person-group-type="author">
<name>
<surname><![CDATA[Ito]]></surname>
<given-names><![CDATA[N.]]></given-names>
</name>
<name>
<surname><![CDATA[Sato]]></surname>
<given-names><![CDATA[Y.]]></given-names>
</name>
<name>
<surname><![CDATA[Song]]></surname>
<given-names><![CDATA[P.K.]]></given-names>
</name>
<name>
<surname><![CDATA[Kaijio]]></surname>
<given-names><![CDATA[A.]]></given-names>
</name>
<name>
<surname><![CDATA[Inoue]]></surname>
<given-names><![CDATA[K.]]></given-names>
</name>
<name>
<surname><![CDATA[Shigesato]]></surname>
<given-names><![CDATA[Y.]]></given-names>
</name>
</person-group>
<source><![CDATA[Thin Solid Films]]></source>
<year>2006</year>
<volume>496</volume>
<page-range>99-103</page-range></nlm-citation>
</ref>
</ref-list>
</back>
</article>
