The study of electro-optical properties of nanocomposite ITO thin films prepared by e-beam evaporation
M. Farahamndjou
Department of physics, Varamin Pishva Branch, Islamic Azad University, Varamin, Iran, Tel: +982136725011-14, e-mail: farahmandjou@iauvaramin.ac.ir
Received 17 September 2012; ]]> Accepted 6 February 2013
Abstract
Indium-tin oxide thin films are deposited on sods lime glass substrates using e-beam evaporation system. In order to improve the structural, electrical and optical properties of the films, these films were annealed in vacuum and different temperature. The structure, sheet resistance and optical transmission of the films were systematically investigated as function of post annealing temperature. It has been observed that the films take its maximum transmission and conductivity at annealing temperature 400°C. The XRD and AFM analysis reveals that the amorphous films were oriented to (222) crystal texture direction with size of grains about 35-40 nm.
Keywords: ITO Nano-composite; crystallity; optical transmission; Thin Films.
PACS: 73.63.Bd; 78.67.Bf; 78.67.Sc
DESCARGAR ARTÍCULO EN FORMATO PDF
]]> Acknowledgments
The author is thankful for the financial support of Karaj material and energy research center for analysis and the discussions on the results.
References
1. I. Hambergend and C.G. Granquist, J. Appl. Phys. 60 (1986) 123. [ Links ]
2. Y. Dijaoued, V.A. Phong, S. Balidescu, P.V. Asrit, E.F. Girouard, andZ.V.V. Truong, Thin Solid Films. 293 (1997) 108. [ Links ]
3. D.M. Mattox, Thin Solid Films. 204 (1991) 25. [ Links ]
]]>4. N. Nadaud, N. Lequeux, and M. Nanot, J. Solid State Chemistry. 135 (1998) 140. [ Links ]
5. R.D. Shannon, D.B. Rogers, and A.W. Sleight, Inorg. Chem. 8 (1969) 1985. [ Links ]
6. H.T. Akao, R. Suzuki, M. Tomoda, S. Tsukidate, and K. Fujita, European Patent. 2 (1999) 0921099. [ Links ]
7. H. Kim A. Piqué, J.S. Horwitz, H. Mattoussi, H. Murata, Z.H.. Kafafi, D.B. Chrisey, Appl. Phys. Lett. 74 (1999) 3444. [ Links ]
8. H. Hiramateu, W.S. Seo, and K. Koumoto, Chem. Mater. 10 (1998)3033. [ Links ]
]]>9. I.A. Rauf, R. F. Egerton, and M. Sayer, J. Appl. Phys. 79 (1996) 4057. [ Links ]
10. Y. Shigesato and D.C. Paine, Thin Solid Films. 238 (1994) 44. [ Links ]
11 . F-El Akkad, A. Punnooze, and G. Prabu, Appl. Phys. A. 71 (2000) 157. [ Links ]
12. P. Thilakan, S. Kalainathan, J. Kumar, and P. Ramssamy, J. Electron Mater. 24 (1995) 719. [ Links ]
13. C. Cali, M. Mosa, and G. Taragia, Solid State Electron 42 (1998) 877. [ Links ]
]]>14. M. Rami, E. Benamar, C. Messaoudi, D. Sayah, and A. En-naoui, Europian J. Solid State Inorganic Chem 35 (1998) 211. [ Links ]
15. S.S. Kim, S.Y. Choi, C.G. Park, and H. Woo Jin, Thin Solid Films 347 (1999) 155. [ Links ]
16. H.Y. Yeom, N. Popovich, E. Chason, and D.C. Paine, Thin Solid Films 411 (2002) 17. [ Links ]
17. P. Thilakan, C. Minarini, S. Loreti, and E. Terzini, Thin Solid Films 388 (2001)34. [ Links ]
18. C. Guillen and J. Herrero, Thin SolidFims 510 (2006) 260. [ Links ]
]]>19. C. Guillen and J. Herrero, Thin Solid Fims 480 (2005) 129. [ Links ]
20. A.E. Hichou, A. Kachouane, and J. L. Budendorff, Thin SolidFims 458 (2004) 184. [ Links ]
21. C. Guillen and J. Herrero, Thin Solid Fims 431 (2003) 403. [ Links ]
]]>