Confocal profiling of grooves and ridges with circular section using the divided aperture technique
J.F. Aguilar
Instituto Nacional de Astrofísica Óptica y Electrónica, Luis Enrique Erro No. 1, Sta. Ma. Tonantzintla, Puebla 72840, Pue., México.
Recibido el 1 de marzo de 2005. ]]> Aceptado el 25 de mayo de 2005.
Abstract
The divided-pupil technique for the simulation of confocal imaging is applied to remove those artifacts appearing due to the symmetry of the object. A rigorous treatment is used to model the imaging system which is a two-dimensional confocal microscope, working in reflection mode. Since the geometry of the associated electromagnetic problem is 2-D, the objects analyzed are highly symmetric and cylindrical. The advantages and limitations of this technique are discussed and shown by means of examples.
Keywords: Confocal microscopy; light scattering; optical profilometry.
Resumen
La técnica de pupila dividida se aplica en la simulación de un sistema confocal formador de imágenes para eliminar elementos espurios debidos a la simetría del objeto. Un tratamiento riguroso es usado para modelar la formación de imágenes en el sistema el cual es un microscopio confocal en dos dimensiones; los objetos analizados son altamente simétricos y cilíndricos. Las ventajas y limitaciones de esta técnica son discutidas y demostradas por medio de ejemplos.
Descriptores: Microscopía confocal; esparcimiento de luz; perfilometría óptica.
]]> PACS: 42.25.Fx; 42.30.Va
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Acknowledgment
This work has been supported by CONACyT through the project 37654-E.
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