Rev. mex. fis.- PDF Download - Art. IDS0035-001X2010000100014

Revista mexicana de física
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LEAL-ROMERO, R. et al. Proceso de grabado seco de silicio monocristalino para aplicaciones en guías de onda coplanares. Rev. mex. fis. [online]. 2010, vol.56, n.1, pp.92-96. ISSN 0035-001X.

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