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Journal of applied research and technology

versão On-line ISSN 2448-6736versão impressa ISSN 1665-6423

J. appl. res. technol vol.11 no.2 Ciudad de México Abr. 2013

 

Design of Plasma Generator Driven by High-frequency High-voltage Power Supply

 

C. Yong-Nong*, K. Chih-Ming

 

Department of Electrical Engineering, National Formosa University, No.64, Wunhua Rd., Huwei Township, Yunlin County, 63201, Taiwan, *ynchang@nfu.edu.tw.

 

ABSTRACT

In this research, a high-frequency high-voltage power supply designed for plasma generator is presented. The power supply mainly consists of a series resonant converter with a high-frequency high-voltage boost transformer. Due to the indispensable high-voltage inheritance in the operation of plasma generator, the analysis of transformer need considering not only winding resistance, leakage inductance, magnetizing inductance, and core-loss resistance, but also parasitic capacitance resulted from the insulation wrappings on the high-voltage side. This research exhibits a simple approach to measuring equivalent circuit parameters of the high-frequency, high-voltage transformer with stray capacitance being introduced into the conventional modeling. The proposed modeling scheme provides not only a precise measurement procedure but also effective design information for series-load resonant converter. The plasma discharging plate is designed as part of the electric circuit in the series load-resonant converter and the circuit model of the plasma discharging plate is also conducted as well. Thus, the overall model of the high-voltage plasma generator is built and the designing procedures for appropriate selections of the corresponding resonant-circuit parameters can be established. Finally, a high-voltage plasma generator with 220V, 60Hz, and 1kW input, along with a 22 kHz and over 8kV output, is realized and implemented.

Keywords: power supply, series resonant converter, plasma generator.

 

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