Nanosecond laser ablation of bulk Al, Bronze, and Cu: ablation rate saturation and laser-induced oxidation

 

R. Maisterrena-Epstein¹, S. Camacho-López¹*, L. Escobar-Alarcón², M. A. Camacho-López³

 

¹ Centro de Investigación Científica y de Educación Superior de Ensenada, Km. 107 Carretera Tijuana-Ensenada, Ensenada, Baja California, 22860, México, *corresponding author: camachol@cicese.mx

² Departamento de Física, Instituto Nacional de Investigaciones Nucleares, Apartado Postal 18-1027, México DF, 11801, México

³ Facultad de Medicina, Universidad Autónoma del Estado de México, Paseo Tollocan s/n esq. Jesús Carranza, Toluca, Estado de México, 50120, México

 

Recibido: 20 de marzo de 2007.
Aceptado: 21 de julio de 2007.

 

Abstract

In this work we report about the characteristics of nanosecond laser ablation, in atmospheric air, of bulk Al, Bronze, and Cu. Average per pulse laser ablation rate and its dependence on ablation depth is presented for these three metals. We will demonstrate and discuss some distinctive features of the ablation saturation effect of the above metals. We will also present results on laser-induced oxidation of the metals which results off the ablation event. We studied the laser-induced oxidation effect through energy-dispersive X-ray spectroscopy (EDS or EDX). The EDS results presented here show that the laser irradiated metals oxidize during the ablation process; the metals oxidize to different degrees showing a strong dependence on the net delivered laser fluence.

Keywords: Metals, Pulsed laser ablation, Laser micromachining, Laser-induced oxidation.

 

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Acknowledgments

The authors acknowledge support to this work from CONACyT (Grant 51839). We are grateful to Ing. Israel Gradilla for his help with the SEM images.

 

References

[1] M. C. Gower, Opt. Express 7, 56 (2000).         [ Links ]

[2] H. J. Booth, Thin Solid Films 453-454, 450 (2004).         [ Links ]

[3] N. Rizvi, D. Milne, P. Rumsby, and M. Gower, in: Laser Applications in Microelectronic and Optoelectronic Manufacturing V, Vol. 3933, Eds. H. Helvajian, K. Sugioka, M. C. Gower, and J. J. Dubowski. (Proceedings of SPIE, San Jose, 2000) p. 261.         [ Links ]

[4] D. Ashkenasi, H. Varel, A. Rosenfeld, F. Noack, and E. E. B. Campbell, Nucl. Instr. and Meth. in Phys. Res. B 122, 359 (1997).         [ Links ]

[5] C. Momma, B. N. Chichkov, S. Nolte, F. von Alvensleben, A. Tunnermann, H. Welling, and B. Wellegehausen, Opt. Commun. 129, 134 (1996).         [ Links ]

[6] H. W. Bergmann, K. Schutte, E. Schubert, and A. Emmel, Appl. Surf. Sci. 86, 259 (1995).         [ Links ]

[7] S. Preuss and M. Stuke, Appl. Surf. Sci. 69, 253 (1993).         [ Links ]

[8] D. von der Linde and K. Sokolowski-Tinten, Appli. Surf. Sci. 154-155, 1 (2000).         [ Links ]

[9] M. D. Feit, A. M. Rubenchik, B.-M. Kim, L. B. da Silva, M. D. Perry, Appl. Surf. Sci. 127-129, 869 (1998).         [ Links ]

[10] J. Qiu, K. Miura, H. Inouye, J. Nishii, and K. Hirao, Nucl. Instr. and Meth. in Phys. Res. B 141, 699 (1998).         [ Links ]

[11] J. L. Jiménez-Pérez, P. H. Sakanaka, M. A. Algatti, J. G. Mendoza-Alvarez, A. Cruz-Orea, Appl. Surf. Sci. 175-176, 703 (2001).         [ Links ]

[12] T. V. Kononenko, S. V. Garnov, S. M. Klimentov, V. I. Konov, E. N. Loubnin, F. Dausinger, A. Raiber, and C. Taut, Appl. Surf. Sci. 109-110, 48 (1997).         [ Links ]

[13] T. Lippert, J. T. Dickinson, S. C. Langford, H. Furutani, H. Fukumura, H. Masuhara, T. Kunz, and A. Wokaun, Appl. Surf. Sci. 127-129, 117 (1998).         [ Links ]

[14] J. Kruger, W. Kautek, and H. Newesely, Appl. Phys. A 69 [suppl.], S403 (1999).         [ Links ]

[15] E. Wynne and B. C. Stuart, Appl. Phys. A 76 373 (2003).         [ Links ]

[16] J. Yang, J. Lian, H. Bai, W. Cui, and Z. Guo, ISIJ International 45, 730 (2005).         [ Links ]

[17] R. Evans, S. Camacho Lopez, M. A. Camacho Lopez, C. Sanchez Perez, and A. Esparza Garcia, J of Phys. CS 59, 436 (2007).         [ Links ]

[18] R. Maisterrena Epstein. Caracterización de la ablación láser en metales y PMMA con pulsos cortos (ns) y ultracortos (fs). Tesis de Maestría. (CICESE 2006).         [ Links ]