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Superficies y vacío

versão impressa ISSN 1665-3521

Superf. vacío vol.18 no.4 México Dez. 2005

 

Articles

Integration of bio, nano, micro and cogno in biosensor devices for human health applications

L.M. Lechuga* 

A. Calle* 

C. Domínguez* 

* Grupo de Biosensores, Instituto de Microelectrónica de Madrid (IMM), Centro Nacional de Microelectrónica, CSIC, Isaac Newton, 8.PTM. 28760 Tres Cantos, Madrid, Spain.


Abstract

The design, fabrication and testing of micro/nanobiosensor devices based on optoelectronics and nanomechanical highly sensitive transducers is shown. Most of the devices are fabricated by standard silicon CMOS microelectronics technology after a precise design for achieving a high sensitivity for biosensing applications. Three biosensors have been developed: (a) a Surface Plasmon Resonance biosensor (b) an integrated Mach-Zehnder interferometer micro/nanodevice based on optical waveguides and (c) nanomechanical biosensors based on microcantilevers. Direct biosensing with all the sensors has been tested, after a specific receptor coupling to the surface device using nanometer scale immobilization techniques. Further integration of the micro/nano sensors, the microfluidics, the sources, the photodetectors and the CMOS electronics will render in complete lab-on-a-chip microsystems which could be used in field applications.

Keywords: MEMS; Biosensor; Silicon DMOS

Full text available only in PDF format.

References

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Received: September 08, 2005; Accepted: October 10, 2005

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