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Superficies y vacío

versão impressa ISSN 1665-3521

Superf. vacío vol.18 no.4 México Dez. 2005



Integration of bio, nano, micro and cogno in biosensor devices for human health applications

L.M. Lechuga* 

A. Calle* 

C. Domínguez* 

* Grupo de Biosensores, Instituto de Microelectrónica de Madrid (IMM), Centro Nacional de Microelectrónica, CSIC, Isaac Newton, 8.PTM. 28760 Tres Cantos, Madrid, Spain.


The design, fabrication and testing of micro/nanobiosensor devices based on optoelectronics and nanomechanical highly sensitive transducers is shown. Most of the devices are fabricated by standard silicon CMOS microelectronics technology after a precise design for achieving a high sensitivity for biosensing applications. Three biosensors have been developed: (a) a Surface Plasmon Resonance biosensor (b) an integrated Mach-Zehnder interferometer micro/nanodevice based on optical waveguides and (c) nanomechanical biosensors based on microcantilevers. Direct biosensing with all the sensors has been tested, after a specific receptor coupling to the surface device using nanometer scale immobilization techniques. Further integration of the micro/nano sensors, the microfluidics, the sources, the photodetectors and the CMOS electronics will render in complete lab-on-a-chip microsystems which could be used in field applications.

Keywords: MEMS; Biosensor; Silicon DMOS

Full text available only in PDF format.


[1] C. Domínguez, L.M. Lechuga and J.A. Rodríguez. Integrated optical chemo- and Biosensors. In Integrated Analytical Systems. Ed. S. Alegret. (Elsevier Science BV, Amsterdam, 2003). [ Links ]

[2] L.M. Lechuga, B. Sepúlveda, J. Sánchez del Río, F. Blanco, A. Calle and C. Domínguez . Proceedings of Photonics West (SPIE), Integrated Optoelectronics Devices, 5357 (2004). [ Links ]

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[10] L.M. Lechuga, A. Calle and F. Prieto. Optical sensors based on evanescent field sensing. Part I. Surface Plasmon Resonance Sensors. Química Analítica 19 (2000). [ Links ]

[11] L. M. Lechuga, F. Prieto andB. Sepúlveda. Interferometric Biosensors for environmental pollution detection. In Optical Sensors for Industrial, (Springer, Berlín, 2003). [ Links ]

[12] F. Prieto, A. Llobera, A. Calle, C Domínguez andL.M. Lechuga. J. Lightwave Tech. 18, 966 (2000). [ Links ]

[13] F. Prieto, B. Sepúlveda, A. Calle, A. Llobera, C. Domínguez, A. Abad, A. Montoya andL.M. Lechuga. Nanotechnology 14, 907 (2003). [ Links ]

[14] Wu, H. Ji, K. Hansen, T. Thundat, R. Datar, R. Cote, M. F. Hagan, A. K. Chakraborty, A. Majumdar, Proc. Natl. Acad. Sci. USA 98, 1560 (2001). [ Links ]

[15] Álvarez, A. Calle, J. Tamayo, A. Abad, A. Montoya andL.M. Lechuga. Biosensors & Bioelectronics 18, 649 (2003). [ Links ]

Received: September 08, 2005; Accepted: October 10, 2005

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