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Superficies y vacío
versión impresa ISSN 1665-3521
Superf. vacío vol.18 no.4 Ciudad de México dic. 2005
Articles
Integration of bio, nano, micro and cogno in biosensor devices for human health applications
* Grupo de Biosensores, Instituto de Microelectrónica de Madrid (IMM), Centro Nacional de Microelectrónica, CSIC, Isaac Newton, 8.PTM. 28760 Tres Cantos, Madrid, Spain.
The design, fabrication and testing of micro/nanobiosensor devices based on optoelectronics and nanomechanical highly sensitive transducers is shown. Most of the devices are fabricated by standard silicon CMOS microelectronics technology after a precise design for achieving a high sensitivity for biosensing applications. Three biosensors have been developed: (a) a Surface Plasmon Resonance biosensor (b) an integrated Mach-Zehnder interferometer micro/nanodevice based on optical waveguides and (c) nanomechanical biosensors based on microcantilevers. Direct biosensing with all the sensors has been tested, after a specific receptor coupling to the surface device using nanometer scale immobilization techniques. Further integration of the micro/nano sensors, the microfluidics, the sources, the photodetectors and the CMOS electronics will render in complete lab-on-a-chip microsystems which could be used in field applications.
Keywords: MEMS; Biosensor; Silicon DMOS
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Received: September 08, 2005; Accepted: October 10, 2005
This is an open-access article distributed under the terms of the
Creative Commons Attribution License
