Infrared and Raman characterization of amorphous carbon nitride thin films prepared by laser ablation

Escobar-Alarcón, L.; Arrieta, A.; Camps, E.; Romero, S.; Camacho-Lopez, M. A.; Escobar-Alarcón, L.; Arrieta, A.; Camps, E.; Romero, S.; Camacho-Lopez, M. A.

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Superficies y vacío

versión impresa ISSN 1665-3521

Superf. vacío vol.18 no.3 Ciudad de México sep. 2005

Articles

Infrared and Raman characterization of amorphous carbon nitride thin films prepared by laser ablation

L. Escobar-Alarcón^c

A. Arrieta^b

E. Camps^c

S. Romero^a

M. A. Camacho-Lopez^c

^{^a} Departamento de Física, Instituto Nacional de Investigaciones Nucleare Apdo. Postal 18-1027, México DF 11801, México

^{^b} Departamento de Física, Universidad Autónoma Metropolitana Iztapalapa, Apdo. Postal 55-534, México D. F. 09340, México

^{^c} Facultad de Química, Universidad Autónoma del Estado de México, Paseo Colón y Tollocan, Toluca Edo. de México, 50110, México.

Abstract

Infrared and Raman spectroscopies have been used to characterize the presence of sp² and sp³ bonds in carbon nitride films providing some information about the sp²/sp³ ratio. The Raman results revealed that the increase in size or number of sp² clusters is the result of two processes, which include the increase of nitrogen content and particle bombardment, so that under certain experimental conditions a film with practically the same composition but different microstructure can be obtained. IR results reveal the presence of carbon-carbon, carbon-nitrogen, carbon-oxygen and carbon-hydrogen bonding, and their intensities depend on the laser fluence used for deposition.

Keywords: Laser ablation; Carbon nitride; Raman spectroscopy; Infrared spectroscopy

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References

[1] S. E. Rodil, Recent Res. Devel. Applied Phys., 6, 391 (2003). [ Links ]

[2] Z. Zhou, L. Xia; J. Phys D: Appl. Phys., 35 1991 (2002). [ Links ]

[3] A.C. Ferrari, Surf. and Coat. Technol., 180-181, 190 (2004). [ Links ]

[4] Casiraghi C, Ferrari AC, Robertson J, Phys. Rev. B 72, 085401 (2005). [ Links ]

[5] D. B. Geohegan, in: Chrisey, D.B., Hubler, G.K. (Eds.), “Pulsed Laser Deposition of Thin Films”, John Wiley & Sons, New York (1994), Chap. 5. [ Links ]

[6] L. Escobar-Alarcón, J. E. Villarreal Barajas, E. Camps, S. Muhl, E. Haro-Poniatowski., S. Romero, B. Salinas, Mater. Sci. Eng. B, 90, 81 (2001). [ Links ]

[7] T. Szörényi, E. Fogarassy, C. Fuchs, J. Hommet, F. Le Normand; Appl. Phys. A, 69, 941 (1999). [ Links ]

Received: June 15, 2005; Accepted: August 17, 2005

This is an open-access article distributed under the terms of the Creative Commons Attribution License