Plenaria

Nanobiosensors based on optoelectronic and nanomechanical transducers for genomic and proteomic applications

L. M. Lechuga, J. Tamayo, A. Calle, and C. Domínguez

Grupo de Biosensores, Centro Nacional de Microeléctronica (CNM), CSIC, Isaac Newton, 8 – 28760 Tres Cantos, Madrid (Spain), e–mail: laura@imm.cnm.csic.es

Articulo invitado

Abstract

We show the design, fabrication and testing of micro/nanobiosensor devices based on highly sensitive optoelectronic and nanomechanical transducers. Most of the devices are fabricated by standard Silicon CMOS microelectronics technology according to a precise design for achieving a high sensitivity for biosensing applications. Three biosensors have been developed: (a) a Surface Plasmon Resonance biosensor, (b) an integrated, Mach–Zehnder micro/nano interferometer device based on optical waveguides, and (c) nanomechanical biosensors based on microcantilevers.

Keywords: Biosensor; nanotechnology; optoelectronics.

Resumen

En este artículo se muestra el diseño, la fabricación y la caracterización de dispositivos micro/nanobiosensores basados en transductores optoelectrónicos y nanomecánicos. La mayoría de los dispositivos se fabrican con tecnología estándar de Si compatible CMOS, después de un cuidadoso diseño de los transductores para conseguir biosensores de alta sensibilidad. Se muestran tres tipos de biosensors: (a) un biosensor de Resonancia de Plasmón Superficial (b) un micro/nano Ínterferómetro integrado Mach–Zehnder basado en guías de ondas ópticas y (c) biosensores nanomecánicos basados en micropalancas.

Descriptores: Biosensores; nanotenologia; optica integrada.

PACS: 42.25.–p; 42.82.–m; 85.85.+j

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