Resumo

RENDON, G.; POOT, P.; OLIVA, A. l.  e  ESPINOSA-FALLER, F. J.. A Simple Substrate Heater Device With Temperature Controller for Thin Film Preparation. J. appl. res. technol [online]. 2012, vol.10, n.4, pp.549-556. ISSN 2448-6736.

A simple substrate heater and its temperature controller were designed and built in order to prepare thin films in a high vacuum deposition system. The substrate heater was elaborated with a glass-ceramic body and a molybdenum foil heater. The applied power and the temperature are regulated by a power controller board using a microcontroller programmed with a proportional-integrative-derivative algorithm. The heater/controller system was tested in a high vacuum deposition system and the results of its characterization at 100, 200, 300 and 400 °C are presented. A variation in temperature better than ± 0.5 °C was obtained for all the tested temperatures. An application of the substrate heater is demonstrated by evaporating gold thin films on heated glass substrates.

Palavras-chave : substrate heater; temperature controller; vacuum thin film deposition.

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