Resumo

KUSSUL, E. et al. CNC machine tools for low cost micro devices manufacturing. J. appl. res. technol [online]. 2004, vol.2, n.1, pp.76-91. ISSN 2448-6736.

A new technology for production of low-cost micromechanical devices is proposed. This technology is based on concepts already known in conventional mechanics, used to produce a number of equipment of smaller sizes generation after generation. It is necessary to adapt each generation of equipment to the changes in physical behavior due to the decreasing scale. This technology is developed in the context of the microfactory creation. The main requirements for microequipment development are discussed. Also, the micromachine tool prototypes belonging to the first generation are developed and tested in the Laboratory of Micromechanics and Mechatronics of the Center of Applied Research and Technological Development, UNAM. The equipment characterization is done. The microfilter design and fabrication is described as an example of the practical application.

Palavras-chave : Micromachine tool; Microfilters; Accuracy.

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