Resumo

ARENAS, Concepción et al. Sensores piezoeléctricos de fluoruro de polivinilideno modificado con nanopartículas de sílice para aplicaciones en MEMS. Superf. vacío [online]. 2010, vol.23, n.3, pp.20-25. ISSN 1665-3521.

The piezoelectric properties of Poly(vinylidene) Fluoride (PVDF) were modified through silica nanopartilces (200nm). Micrometer thick films were prepared by dissolving PVDF powder in a N,N-Dimethylformamide solution, preheated at 60 °C and 110 °C, to produce the β phase of the polymer. Piezoelectric sensors were produced with the PVDF films placed between copper plates, as electrodes. These devices were subjected to 50DN through 400DN stresses, observing signifact changes in the piezoelectric response as a function of the silica content. The maximum potential was found at 5wt% of silica content. At concentrations above 5wt.% the potential is slightly reduced, due to the inhomogeneous distribution of the nanoparticles. The method described could be employed to develop MEMS.

Palavras-chave : Piezoelectricity; Poly(vinylidene) fluoride; Silica nanoparticles.

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