Resumo

LOPEZ-ITURBE, J.; CAMACHO-LOPEZ, M.A.; ESCOBAR-ALARCON, L.  e  CAMPS, E.. Synthesis and characterization of LiNiO ₂ targets for thin film deposition by pulsed laser ablation. Superf. vacío [online]. 2005, vol.18, n.4, pp.27-30. ISSN 1665-3521.

In order to deposit LiNiO2 thin films by pulsed laser deposition (PLD), a LiNiO2 target was prepared by a solid-state reaction from NiO and Li2O. The effect of the Li2O wt. % excess on the final product was studied. X-Ray Diffraction and Micro-Raman Spectroscopy were used to analyze the structure of the obtained targets. A stoichiometric target prepared by the solid- state reaction was used for thin film deposition. The influence of laser fluence and annealing temperature on the structural properties of the deposited thin films was analyzed by Micro-Raman spectroscopy.

Palavras-chave : Thin Films; Pulsed Laser Deposition; Micro Raman Spectroscopy; Lithium Microbatteries.

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