Resumo

OLIVA, A.I.; MARTIN-VARGUEZ, P.E.; GONZALEZ-PANZO, I.J.  e  GONZALEZ-CHAN, I.J.. Role of the species distribution diagram in the thin semiconductor layers deposition by chemical bath. Rev. Mex. Ing. Quím [online]. 2016, vol.15, n.1, pp.209-220. ISSN 1665-2738.

In this work, the methodology for obtaining the species distribution diagrams for depositing semiconductor films by chemical bath is discussed. The species distribution diagrams are useful for predicting the physicochemical conditions for achieving major control for materials deposition. By using ZnCl2 or ZnSO4, KOH, NH4NO3 and SC(NH2) 2 as chemical reagents for the bath, as well as the most probably chemical reactions between these chemical reagents, a range of deposition temperature (from 25 to 90 °C) and the different species formed by these reagents concentrations, the species distribution diagrams as a function of the pH were obtained. By using the species diagrams, thin films were deposited under different conditions in order to highlight their importance to obtain ZnS, ZnO and Zn(OH)2 thin films with better optical and structural qualities. The results indicate that the better conditions for obtaining the high quality films can change with the bath temperature and with the concentrations of the chemical reagents.

Palavras-chave : ZnS films; species distribution diagrams; chemical bath deposition; physicochemical conditions; physical properties.

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