Resumo

MARQUEZ-HERRERA, Alfredo et al. Substrate Temperature Study in the Crystallinity of BaTiO₃ Thin Films. Ing. invest. y tecnol. [online]. 2013, vol.14, n.3, pp.317-323. ISSN 2594-0732.

Ferroelectric thin films of BaTiO₃ (BTO) were grown on quark, and nichrome substrates using a BaTiO₃ target by RF-Sputtering technique. It was studied the effect of the substrate temperature in the crystallization of the material. These samples were compared with films deposited at room temperature and heat treated out of the growth Chamber. Their crystallinity were studied by X-ray diffraction. Additionally, the optical characterizations were carried out by UV-Vis spectrophotometer. The growth of thin films with substrate temperature allows the obtaining of crystalline materials at temperatures below those reported by other authors.

Palavras-chave : thin films; annealing; BaTiO₃.

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