Resumen

REYES, P.G. et al. Plasma diagnostics of glow discharges in mixtures of CO₂ with noble gases. Rev. mex. fis. [online]. 2017, vol.63, n.4, pp.363-371. ISSN 0035-001X.

This study presents the plasma diagnostics of a glow discharge produced in two different mixtures, CO2/He and CO2/Ar, at a constant pressure of 1.5 Torr. The experiment was conducted to determine the carbon dioxide decomposition in the plasma by using the optical emission spectroscopy (OES) method through identifying lines and emission bands in the spectra. In addition, an electrical characterization of the mixture plasma was made by the determination of ion density (ni) and the electronic temperature (Te), estimated through a double Langmuir probe. The electronic temperature for the mixture plasma was in the range of 2.07-5.37 eV, and the ion density between 2.15 × 109 and 18.70 × 109 particles/cm3. The principal bands and lines identified in the OES correspond to ${\mathrm{C}\mathrm{O}}_2^{+}$, CO2, CO+, CO, O*, O2, ${\mathrm{O}}_2^{+}$, C2, He* and Ar*.

Palabras llave : Langmuir probe; electron temperature (T_e); ion density (n_i); OES; gas mixture.

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