Resumo

MARQUEZ-HERRERA, A. et al. Efecto de la temperatura de substrato en las propiedades estructurales, ópticas y ferroeléctricas de películas delgadas de BaTiO₃ depositadas por RF sputtering. Rev. mex. fis. [online]. 2012, vol.58, n.4, pp.308-312. ISSN 0035-001X.

Thin Films of Barium Titanate (BaTiO₃) were grown on nichrome and quartz substrates, using a BaTiO₃ target, by RF-sputtering technique. We varied the substrate temperature in order to study its effect on the structural, optical and ferroelectric properties of the samples. The results of the X-Ray diffraction showed tetragonal structure with increases of the cristallinity as increases the substrate temperature. Furthermore, it observed by ultraviolet-visible (UV-VIS) spectroscopy that the band gap decreased as the substrate temperature increases showing abrupt sharp decrease at 494.8°C. The ferroelectric properties of the films showed a dependence with substrate temperature, the best ferroelectric answer was obtained at 494.8^o C.

Palavras-chave : Thin films; annealing; heater system.

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