Revista mexicana de física
versión impresa ISSN 0035-001X
OLAYA, J.J.; MARULANDA, D.M.; RODIL, S.E. y BHUSHAN, B.. Propiedades mecánicas de nitruros metálicos depositados con UBM: tecnología eficiente y ambientalmente limpia. Rev. mex. fis. [online]. 2009, vol.55, n.6, pp. 425-431. ISSN 0035-001X.
The aim of this research is to study the influence of the magnetic field configuration in a sputtering system on the mechanical properties of CrN, TaN, TiN, NbN and ZrN coatings. Different magnetic field configurations were quantified through the unbalance coefficient, KG , which is proportional to the zero field point in the magnetron. In this work, films were deposited in two magnetic field configurations, KG =1.3 and 0.825. The most important effect of the magnetic field configuration was observed on film hardness. When depositing on AISI M2 and 304 steels, mechanical properties and wear resistance were increased when increasing energy parameter; higher hardness was obtained for TaN, NbN and ZrN films. Another consequence of the change in the magnetic field was compressive residual stress variation. Higher variation was presented on TaN films while CrN films presented lower stress concentration.
Palabras llave : UnBalanced Magnetron Sputtering; CrN; TaN; TiN; NbN; ZrN.