Abstract

DUARTE-MOLLER, A; ESPARZA PONCE, H; YOCUPICIO, I  and  GONZALEZ-VALENZUELA, C. XANES and EXAFS study of the TiN Thin films grown by the pulsed DC sputtering technique assisted by balanced magnetron. Rev. mex. fis. [online]. 2007, vol.53, suppl.3, pp.78-81. ISSN 0035-001X.

A series of different Ti_x N_y thin films were grown by the DC-sputtering technique. The purpose for this work was to study through XAS interpretation, how the different amounts of N₂ during growing thin TiN thin films, affects the stoichiometry of the TiN deposited. Also the results obtained determinate how to interpret the spectra to see the different valences of Ti in TiN, are working. The results were supported with the EXAFS and XANES analysis. This work concludes the adequated conditions for this experiment to obtain TiN as thin film by the DC sputtering assited by pulsed balanced magnetron at room temperature and aconcludes which XANES spectra are the finger print for valences of Ti.

Keywords : TiN; Nitruration; thin films; PLD.

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