Structural and electro-thermal analysis of a magnetic resonant sensor structure based on Lorentz force

 

A. L. Herrera-May¹, J. Martínez-Castillo¹, P. J. García-Ramírez¹, E. Morales-González², A. Ramírez-Treviño³, W. Calleja-Arriaga⁴

 

¹ Research Center for Micro and Nanotechnology, Veracruzana University, Z.C. 94294, Boca del Río, Ver., México, leherrera@uv.mx, jaimartinez@uv.mx, jagarcia@uv.mx

² Engineering Faculty of Veracruzana University, Z.C. 94294, Boca del Río, Ver., México, emorales@uv.mx

³ CINVESTAV-Guadalajara, Z.C. 45010, Zapopan, Jal., México, art@gdl.cinvestav.mx

⁴ National Institute of Astrophysics, Optics and Electronics, Apdo. 51, Sta. María Tonantzintla, Puebla, México, wcalleja@inaoep.mx

 

Recibido: 14 de marzo de 2006.
Aceptado: 29 de agosto de 2006.

 

Abstract

The structural and electro-thermal analysis of a resonant structure for a magnetic sensor based on MEMS technology is presented in this paper. The effect of squeeze-film damping is included by mean of a theoretical model and using finite element software. In addition, analysis of the dynamic torsional model of magnetic structure is realized. The design of resonant structure considers a hollow rectangular configuration with thin beams of 20μm of width and 1.50μm of thickness suspended over a cavity that takes advantage of the Lorentz force principle allowing the detection of magnetic fields at levels of tens Gauss. The analytical results and simulations with finite element indicate that the vertical displacement has a linear behavior with low power consumption and a maximum Von Mises stress of 20.22MPa with a peak to peak voltage of 2 V.

Keywords: MEMS; magnetic field; Lorentz force; dynamic torsional model; resonant frequency.

 

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