Resumo

ROJAS H., A.G. et al. Diseño de una superficie cónica en silicio cristalino. Rev. mex. fis. [online]. 2005, vol.51, n.6, pp.620-625. ISSN 0035-001X.

A fabrication design of a conic surface (k = -6.5), in monocrystalline silicon substrate and based on anisotropic etching with KOH, is presented. The conical surface is approximated by means of spherical windows; comparisons between diameter and separation of the spherical windows, as well as the parameters that govern the selection are discussed.

Palavras-chave : Optoelectronic devices; micromachining in microelectronics; optical mirrors.

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